1 | Air generated from Air Supply Unit becomes clean air generated through three kinds of 8 step filters |
2 | Formed to have constant temperature, relative humidity and ventilation |
3 | It is possible to supply clean air into the emission test chamber and to collect quantitative samples at the exit |
4 | Oilless type head is used for clean air generation and 50L storage tank is used to reduce the pulse generated during air compression |
5 | It is possible to transmit temperature and humidity data in real time and save as files |
6 | It enables chamber testing of high pressure by vaporizing the tightness of the small chamber |
7 | Sampling Pump, which can be collect samples simultaneously in 9 chambers |
8 | Sample holder configuration for liquid sample (paint, adhesive, etc.) and solid sample |
9 | Condensation prevention by humidity control improves the accuracy of temperature and humidity due to no dew condensation inside the chamber |
10 | Improved humidity accuracy by mixing dry air and humid air |
11 | Small chamber process test method conformity with background concentration (VOCs 20μg / ㎥ or less / HCHO 5ug / ㎥ or less) |
12 | Small chamber holder makes transportation convenient. |
13 | Nine small chambers allow multiple experiments. |
Capacity | 9 stage (two door chamber) |
Display | 5.7”TFT Color LCD Touch Screen |
Power Supply | AC220V 30A |
Temp. range | 0~50℃ (Accuracy 0.5℃) |
Temp. &Humidity control range | ±0.5℃ / ±0.5% (with specimens no load) |
Allowable heat load | 1.2kw |
Refrigerator | 600W |
Material | SUS 304 (Electric Polishing) |
Inner Chamber Dimension | 900(W)Ⅹ650(D)Ⅹ1400(H)mm |
Outer Chamber Dimension | 1300(W)Ⅹ900(D)Ⅹ1820(W)mm |
Clean Air TrapFilter | 3 Stage 8 Step Filter |
Background | VOCs <20ug/㎥ HCHO<5ug/㎥ |
Air Control | Mass Flow Controller (Max. 9-ch) |
Mass Flow Controller | Clean Air MFC : full scale 300ml/min TotalAirMFC:2,000ml/min WetAirMFC:1,000ml/min |
Power | 0 ~ 5VDC |
type | 5 Fastener type |
Material | SUS 304 (Electric Polishing) |
Capacity | 20L |
type | 4 volt fixed (2 step 8 Clip type) |
Material | SUS 304 (Electric Polishing) |
Capacity | W187XD187XH40mm |
Range | Temp. -10℃ ~ 120℃ Humidity0%~95% |
Output 3-wire output | RH 4~20mA, Temp. passive 3-wire output |
Accuracy ±2%, Pt 100Ω | ±2%, Pt 100Ω |
Power | 10 ~ 35VDC |
Flow range (N2 equivalent, 20°C/1 atm) | 10 SCCM–20 SLM (freely selectable) |
Senso | Thermal mass flow sensor |
Valve type | Proportional solenoid valve (closed when not energized) |
Control range | 2 –100% (F.S.) |
Response | 2 sec. or less (0–100% within±2% typical) |
Accuracy | ±1.0% F.S. (25°C) |
Temperature coefficient | ±0.1 F.S./°C (15–35°C) |
Repeatability | ±0.5%F.S. |
Operating differential pressure | F.S. ≤ 5 SLM: 50–300 kPa (G) |
F.S. > 100 SLM: 50–300 kPa (G) | |
Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available. | |
Allowable operating pressure | 500 kPa (G) or less |
Proof pressure | 980 kPa (G) |
Leak rate | 1 × 10-8 Pa·m3/s or less (excluding permeation of He) |
Allowable ambient temperature | 5–45°C |
Allowable ambient humidity | 10–90% (No condensation allowed) |
Materials of parts in contact with gases | Body: SUS316 |
Valve seat: FKM (option: CR or NBR) | |
Sealing: FKM (option: CR or NBR) | |
Electric connection | Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
Flow rate input signals | 0 –5 VDC (Input impedance: 1 MΩ or more) |
Flow rate output signals | 0 –5 VDC (External load resistance: 250 kΩ or more) |
Required power supply | +15 VDC (±5%) 100 mA,−15 VDC (±5%) 250 mA |
Joint (Main unit bore) | Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. |
Weight | Approx. 1000 g |